반도체 클린룸용 배기 열회수식 외기공조시스템의 에너지소비 수치해석

Numerical Analysis on Energy Consumption of an Exhaust Air Heat Recovery Type Outdoor Air Conditioning System for Semiconductor Manufacturing Clean Rooms

In recent semiconductor manufacturing clean rooms, in order to improve clean room air quality, air washers are used to remove airborne gaseous contaminants such as $NH_3$, SOx and organic gases from the outdoor air introduced into clean room. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery is therefore useful for reducing the outdoor air conditioning load for a clean room. Therefore it is desirable to recover heat from the exhaust air and use it to reheat the outdoor air. In the present study, numerical analysis and experiment was conducted to simulate the amount of energy reduction of exhaust air heat recovery type air washer system. The present numerical results showed good agreement with the results of the experimental data.