한국정보디스플레이학회:학술대회논문집
- 2009.10a
- /
- Pages.138-141
- /
- 2009
Manufactured Flexible Active Matrix Backplanes using Self-Alighed Imprint Lithography (SAIL)
- Kwon, Oh-Seung (Phicot, Inc.) ;
- Marcia-Almanza-Workman, Marcia-Almanza-Workman (Phicot, Inc.) ;
- Braymen, Steve (Power Film Inc.) ;
- Cobene, Robert (Hewlett-Packard Company) ;
- Elder, Richard (Hewlett-Packard Company) ;
- Garcia, Robert (Phicot, Inc.) ;
- Gomez-Pancorbo, Fernando (Hewlett-Packard Company) ;
- Hauschildt, Jason (Power Film Inc.) ;
- Jackson, Warren (Hewlett-Packard Company) ;
- Jam, Mehrban (Hewlett-Packard Company) ;
- Jeans, Albert (Hewlett-Packard Company) ;
- Jeffrey, Frank (Power Film Inc.) ;
- Junge, Kelly (Power Film Inc.) ;
- Kim, Han-Jun (Phicot, Inc.) ;
- Larson, Don (Power Film Inc.) ;
- Luo, Hao (Hewlett-Packard Company) ;
- Maltabes, John (Hewlett-Packard Company) ;
- Mei, Ping (Hewlett-Packard Company) ;
- Perlov, Craig (Hewlett-Packard Company) ;
- Smith, Mark (Hewlett-Packard Company) ;
- Stieler, Dan (Power Film Inc) ;
- Taussig, Carl (Hewlett-Packard Company)
- Published : 2009.10.12
Abstract
Progress in the development of a fully roll-to-roll selfaligned imprint process for producing active matrix backplanes with submicron aligned features on flexible substrates is reported. High performance transistors, crossovers and addressable active matrix arrays have been designed and fabricated using imprint lithography. Such a process has the potential of significantly reducing the costs of large area displays. The progress, current status and remaining issues of this new fabrication technology are reported.