한국정보디스플레이학회:학술대회논문집

한국정보디스플레이학회 (The Korean Infomation Display Society)
권호 표지

Fabrication of ITO-less Sustain Electrodes for High Resolution Plasma Display Panel by X-Ray Lithographic Process

  • Ryu, Seung-Min (Sch. of Mechanical Engineering & Aerospace System, KAIST) ;
  • Yang, Dong-Yol (Sch. of Mechanical Engineering & Aerospace System, KAIST) ;
  • So, Jae-Yong (Dept. of Polymer Science, Kyungpook Nat. Univ.) ;
  • Park, Lee-Soon (Dept. of Polymer Science, Kyungpook Nat. Univ.) ;
  • Cheong, Hee-Woon (Dept. of Electrical Engineering & Computer Science, Seoul Nat. Univ.) ;
  • Whang, Ki-Woong (Dept. of Electrical Engineering & Computer Science, Seoul Nat. Univ.)
  • 발행 : 2009.10.12
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초록

X-ray lithography was employed to fabricate ITO-less high resolution sustain electrodes for plasma display panel (PDP). A polyimide film based X-ray mask and Xray sensitive Ag electrode paste were fabricated to check their effect on the patterning of Ag electrodes with less than 30 ${\mu}m$ in width. The X-ray lithographic method was found to be useful for the high resolution sustain electrode patterns due to the high penetration power and low scattering property of X-ray source.

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