한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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- Pages.713-715
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- 2009
A theoretical approach to the preferred orientation formation of MgO protection layer using adatom diffusion
- Yu, Hak-Ki (Dept. of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH)) ;
- Lee, Jong-Lam (Dept. of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH))
- 발행 : 2009.10.12
초록
Preferred orientation of MgO protection layer is controlled via adjusting diffusion of adatom between (111) plane with highest neighbor atoms and (200) plane with lowest neighbor atoms. The diffusion of adatom could be modulated by the factors such as substrate temperature, deposition rate, and extra energy applied on adatom like ion beam energy.