Improvement of PMOLED life time using Mg-Zn-F thin film passivation

  • Kim, Jae-Hyun (Department of Sensor and Display Engineering, Kyungpook National Univ.) ;
  • Seo, Jun-Seon (Department of Sensor and Display Engineering, Kyungpook National Univ.) ;
  • Hong, Seok-Min (Department of Sensor and Display Engineering, Kyungpook National Univ.) ;
  • Kang, Byoung-Ho (School of Electrical Engineering and Computer Science, Kyungpook National Univ.) ;
  • Kim, Do-Eok (School of Electrical Engineering and Computer Science, Kyungpook National Univ.) ;
  • Lee, Sung-Youp (Department of Nano-Science & Technology, Kyungpook National Univ.) ;
  • Shin, Byong-Wook (Department of Physics, Kyungpook National Univ.) ;
  • Lee, Hyeong-Rag (Department of Physics, Kyungpook National Univ.) ;
  • Kim, Hak-Rin (School of Electrical Engineering and Computer Science, Kyungpook National Univ.) ;
  • Kang, Shin-Won (School of Electrical Engineering and Computer Science, Kyungpook National Univ.)
  • Published : 2009.10.12

Abstract

We manufactured a novel gas permeation thin film passivation by using inorganic Mg-Zn-F target which has better optical characteristics and high electronegativity. We fabricated targets in various composition ratio and formed about 200nm which is limited thickness of the flexible display. Applied to PLED device, the target which composed of $MgF_2$ and Zn at the ratio of 4:6, WVTR was reached the measurement limit of the equipment, $10^{-3}g/m^2{\cdot}day$ and the life time was increased 25 times better than PLED device which is non-passivation.

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