Blue Multi-Laser-Diode Annealing(BLDA) Technologies for Poly-Si Films

  • Ogino, Yoshiaki (Engineering Department 1, Hitachi Computer Peripherals Co., Ltd.) ;
  • Iida, Yasuhiro (Engineering Department 1, Hitachi Computer Peripherals Co., Ltd.) ;
  • Sahota, Eiji (Engineering Department 1, Hitachi Computer Peripherals Co., Ltd.) ;
  • Terao, Motoyasu (Engineering Department 1, Hitachi Computer Peripherals Co., Ltd.) ;
  • Chen, Yi (Faculity of Engineering, University of the Ryukyus) ;
  • Noguchi, Takashi (Faculity of Engineering, University of the Ryukyus)
  • Published : 2009.10.12

Abstract

We developed a new laser irradiation (BLDA: Blue Multi-Laser-Diode Annealing) system. The system forms the uniform line beam, which is constructed by 48 pieces of semiconductor lasers. This new system has achieved high laser output stability and the highly accurate beam shape by adopting a reliable laser control, the auto-focus control in addition to an original laser photosynthesis technology and the beam homogenizing technology. It was confirmed to crystallize the Si films effectively with good quality.

Keywords