Electronics processed at very low temperature (T<180$^{\circ}C$)

  • Mohammed-Brahim, T. (Groupe Microelectronique, IETR, University Rennes 1)
  • 발행 : 2009.10.12

초록

The long way toward new silicon technology, processed at very low temperature on any substrate, is described. The technology is based on CMIS (Complementary Metal Insulator Semiconductor) structure that shown its efficiency with known CMOS electronics. Present performance of this new technology is discussed through electrical parameters and reliability of transistors.

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