The strategy for the fabrication of oxide TFTs with excellent device stabilities: The novel oxide TFT

  • Published : 2009.10.12

Abstract

The two approaches to improve the stability of oxide TFTs are described. First approach is the optimization of device architecture including MIS structure and passivation layer using conventional InGaZnO semiconductor channel layer. Second approach is to develop the new kinds of oxide semiconductor materials, which is very robust and stable against the gate bias stress and thermal stress.

Keywords