한국신재생에너지학회:학술대회논문집
- 2009.11a
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- Pages.349-349
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- 2009
Development of textured ZnO:Al films for silicon thin film solar cells
실리콘 박막 태양전지용 텍스처링 ZnO:Al 박막 개발
- Cho, Jun-Sik ;
- Kim, Young-Jin ;
- Lee, Jeong-Chul ;
- Park, Sang-Hyun ;
- Song, Jin-Soo ;
- Yoon, Kyoung-Hoon
- 조준식 (한국에너지기술연구원) ;
- 김영진 (한국에너지기술연구원) ;
- 이정철 (한국에너지기술연구원) ;
- 박상현 (한국에너지기술연구원) ;
- 송진수 (한국에너지기술연구원) ;
- 윤경훈 (한국에너지기술연구원)
- Published : 2009.11.25
Abstract
High quality ZnO:Al films were prepared on glass substrates by in-line RF magnetron sputtering and their surface morphologies were modified by wet-etching process in dilute acid solution to improve optical properties for application to silicon thin film solar cells as front electrode. The as-deposited films show a strong preferred orientation in [001] direction under our experimental conditions. A low resistivity below