Study on laser texturing process for fabrication of high efficiency solar cell

고효율 태양전지 제작을 위한 레이저 텍스쳐링 연구

  • 고지수 (성균관대학교 정보통신공학부) ;
  • 정한욱 (성균관대학교 정보통신공학부) ;
  • 공대영 (성균관대학교 정보통신공학부) ;
  • 이원백 (성균관대학교 정보통신공학부) ;
  • 김광열 (성균관대학교 정보통신공학부) ;
  • 신성욱 ((주)LTS) ;
  • 박홍진 ((주)LTS) ;
  • 최병덕 (성균관대학교 정보통신공학부)
  • Published : 2009.06.25

Abstract

One of the most important issues of crystalline silicon solar cell is minimizing reflectance at the surface. Laser texturing is an isotropic process that will sculpt the surface of a silicon wafer, regardless of its crystallographic orientation. We investigated surface texturing process using Nd-YAG laser ($\lambda$=1064 nm) on multi-crystalline silicon wafer. Removal of slag formed after the laser process was performed using acid solution (HF : $HNO_3$ : $CH_3COOH$ : DI water). The reflectance and carrier lifetime of the samples were measured and analyzed using UV-Vis spectrophotometer and carrier lifetime tester. It was found that the minimum reflectance of the samples was 16.39% and maximum carrier life time was $21.8\;{\mu}s$.

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