Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2009.02a
- /
- Pages.142.2-142.2
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- 2009
Characteristics of sputtered ZnO thin films for active layer of TFT
-
Park, Yong-Seob
(Sungkyunkwan University School of Information and Communication Engineering)
;
- Kim, Young-Ryeol (Sungkyunkwan University School of Information and Communication Engineering) ;
- Lee, Sung-Uk (Sungkyunkwan University School of Information and Communication Engineering) ;
-
Hong, Byung-You
(Sungkyunkwan University School of Information and Communication Engineering)
- Published : 2009.02.11
Abstract
Keywords