The characterization of low-k SiCOH etched film as a function of plasma power

Lee, Sung-Woo (Department of Physics, Brain Korea 21 Physics Research Division, Institute of Basic Science, Sungkyunkwan University) ;
Woo, Ji-Hyung (Department of Physics, Brain Korea 21 Physics Research Division, Institute of Basic Science, Sungkyunkwan University) ;
Choi, Seung-Chae (Department of Physics, Brain Korea 21 Physics Research Division, Institute of Basic Science, Sungkyunkwan University) ;
Jung, Dong-Geun (Department of Physics, Brain Korea 21 Physics Research Division, Institute of Basic Science, Sungkyunkwan University) ;
Yang, Jae-Young (Advanced Nano-tech Development Team, Semiconductor Business, Dongbu HiTek co., Ltd.) ;
Boo, Jin-Hyo (Department of chemistry, Sungkyunkwan University) ;
Cho, Sang-Jin (Department of chemistry, Sungkyunkwan University) ;
Chae, Hee-Yeop (Department of Chemical Engineering, Sungkyunkwan University)