한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2009년도 제36회 동계학술대회 초록집
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- Pages.177.1-177.1
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- 2009
Cu growth on hydrogen plasma treated Cu by metal organic chemical vapor deposition
- Moon, Hock-Key (Sungkyunkwan university, Advanced Materials Science and Engineering) ;
- Lee, Nae-Eung (Sungkyunkwan university, Advanced Materials Science and Engineering)
- 발행 : 2009.02.11