Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)

The Korean Institute of Surface Engineering (한국표면공학회)
권호 표지

Removal Process of Si Sacrificial Layer for Ni 3-Dimentional Structure using F radicals and NO Gas

  • Ahn, J.H. (School of Advanced Materials Science & Engineering, SungKyunKwan University) ;
  • Heo, W. (School of Advanced Materials Science & Engineering, SungKyunKwan University) ;
  • Lee, N.E. (School of Advanced Materials Science & Engineering, SungKyunKwan University)
  • Published : 2009.10.14
Download PDF
⟨ Previous Next ⟩

Abstract

Keywords