Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Highly sensitive CO sensing properties of multilayered $TiO_2$ thin films by colloidal templating

  • Moon, Hi-Gyu (Thin Film Materials Research Center, Korea Institute of Science and Technology (KIST)) ;
  • Shim, Young-Seok (Thin Film Materials Research Center, Korea Institute of Science and Technology (KIST)) ;
  • Jang, Ho-Won (Thin Film Materials Research Center, Korea Institute of Science and Technology (KIST)) ;
  • Kim, Jin-Sang (Thin Film Materials Research Center, Korea Institute of Science and Technology (KIST)) ;
  • Park, Hyung-Ho (Department of Materials science and Engineering, Yonsei University) ;
  • Yoon, Seok-Jin (Thin Film Materials Research Center, Korea Institute of Science and Technology (KIST))
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  • 윤석진 (한국과학기술연구원)
  • Published : 2010.06.16
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Abstract

We investigate CO gas sensing properties of multilayered TiO2 thin film gas sensors fabricated by colloidal templating of 300 nm of polymer spheres. Compared with plain films, the multilayered films show enhanced gas sensing with higher sensitivity and faster response. Also, colloidal templating by using smaller spheres (300 nm in diameter) leads to close-packed multilayered TiO2 thin films with very large-scale. This result suggest that understanding and control of the structures on the sensing properties of multilayered TiO2 thin films by colloidal templating is important in developing the films for real applications.

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