한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2010년도 하계학술대회 논문집
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- Pages.174-174
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- 2010
고밀도 플라즈마를 이용한 ZnO 박막의 식각 특성
The study on dry etching characteristics of ZnO thin films using high density plasma
- Heo, Keyong-Moo (Department of Renewable Energy, Chung-Ang university) ;
- Woo, Jong-Chang (School of Electrical and Electronic Engineering, Chung-Ang university) ;
- Kim, Chang-Il (School of Electrical and Electronic Engineering, Chung-Ang university)
- 발행 : 2010.06.16
초록
In this article, the dry etching mechanism of ZnO thin films in