Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2010.06a
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- Pages.239-239
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- 2010
Design and analysis of AlN piezoelectric micro generators suitable with integration
집적화에 적합한 진동형 AlN 압전 마이크로 발전기의 설계와 해석
- Lee, Byung-Choel (University of Ulsan) ;
- Chung, Gwiy-Sang (University of Ulsan)
- Published : 2010.06.16
Abstract
This paper describes the design and analysis of AlN piezoelectric micro generator. The generator was designed to convert ambient vibration energy to electrical power as a AlN piezoelectric material compatible with integataion process. From the simulation results, the resonance frequency of designed model is about 360 Hz and analyzed the bending mode, displacement and expectation output.