한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2010년도 하계학술대회 논문집
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- Pages.296-296
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- 2010
Ga 도핑된 ZnO 박막의 기판에 따른 성장 특성
Effect of substrate on growth of Ga-doped ZnO thin films
-
김지홍
(고려대학교)
;
-
노지형
(고려대학교)
;
- 류경진 (고려대학교) ;
- 문성준 (고려대학교) ;
-
김재원
(고려대학교)
;
- 도강민 (고려대학교) ;
- 문병무 (고려대학교) ;
-
구상모
(광운대학교)
-
Kim, Ji-Hong
(Korea University)
;
-
Roh, Ji-Hyoung
(Korea University)
;
- Ryu, Kyoung-Jin (Korea University) ;
- Moon, Sung-Joon (Korea University) ;
-
Kim, Jae-Won
(Korea University)
;
- Do, Kang-Min (Korea University) ;
- Moon, Byung-Moo (Korea University) ;
-
Koo, Sang-Mo
(Kwangwoon University)
- 발행 : 2010.06.16
초록
In this work, we report the effect of substrate on the growth of Ga-doped ZnO (GZO) thin films. GZO thin films were deposited on various substrates by using pulsed laser deposition (PLD). The structural properties, surface morphologies, and electrical properties were investigated. From the results of HRXRD, c-plane (0002) oriented growth of GZO films was confirmed on