Fabrication and Experiment of Rotary Ultrasonic Motor with Simple Structure

단순화된 구조의 회전형 초음파모터의 제작 및 실험

  • Published : 2010.06.16

Abstract

The previous cross type USM(ultrasonic motor) has the stator of cross shape composed of 8 ceramics. However, ultrasonic motor with simple structure has the stator composed of only 4 ceramics. Principle of the motor is to apply alternative voltages which have 90 phase difference to attached ceramics, and then elliptical displacement is generated at four edges of elastic body. Characteristics of the motor were simulated by FEM(finite element method). The parameters were size of the stator and thickness of the ceramics. According to FEM results, driving frequency of motor is defined at 28 [kHz]. On the contrary, driving frequency of fabricated motor is defined at 26.8 [kHz] and then, experimental results were compared with FEM results at the frequency. As a result, elliptical displacement and speed of USM increased linearly with increasing applied voltage.

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