A piezoelectric pump using extensional vibration of lateral surface by traveling wave

진행파 여진에 의한 굴곡 신축진동을 이용하는 압전 펌프

In this paper, we propose a novel type valveless micro-pump that uses extensional vibration mode of traveling wave as a volume transporting means for solving some problems about check valves, essential parts of usual pumps. The proposed pump consists of two piezoelectric ceramic rings and a metal body located in the middle of them respectively. Because the drift of bended surface that results from the traveling wave excitation controls the fluid flow, check valves are not needed in this pump model. In accordance with the variation of the pump body dimension, we analyzed the vibration displacement characteristics of pump model, determined the optimal design condition, fabricated the prototype pump from the analysis results and evaluated its efficiency.