한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2010년도 하계학술대회 논문집
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- Pages.363-363
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- 2010
BOE 약액을 사용하는 공정의 로봇 동작 개선
Improved Mechanical Motion in Oxide Wet Etch Process with BOE chemical
- Kim, Eung-Do (Samsung institute of technology University) ;
- Son, Won-Jin (Samsung electronics clean technology group)
- 발행 : 2010.06.16
초록
After oxide wet etch with BOE(Buffered Oxide Etchant), triangle type defect maps were inspected and SEM image showed them unetch of oxide layer. As decreasing design rule, oxide unetch has become a crucial issue and has affected the yield and quality.