한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2010년도 하계학술대회 논문집
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- Pages.384-384
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- 2010
유도결합 플라즈마를 이용하여 식각된 ZnO 박막 표면연구
A Study of The Etched ZnO Thin Film Surface using inductively coupled plasma system
- Woo, Jong-Chang (Chung-Ang University) ;
- Kim, Chang-Il (Chung-Ang University)
- 발행 : 2010.06.16
초록
The surface reaction characteristics of Zinc Oxide (ZnO) in