고전계 전기산화에 의한 나노다공성 알루미나 멤브레인의 제조

Fabrication of Nanoporous Alumina Membrane by High- Field Anodization

Nanoporous anodic alumina membranes (NAAM) with high aspect ratio, self-ordered pore array were fabricated by high-field 2-step anodization method. High voltages of 80, 100, 120 and 140 V as well as 40 V for comparison were applied to an aluminum anode with respect to a Pt cathode immersed both in 0.3M oxalic acid solution in order to investigate the self-ordering characteristics of the nanoporous structure. The pore structures, including interpore distance, pore size, pore density, and porosity as well as the ordering characteristic were analyzed using field-enhanced scanning electron microscopy (FE-SEM) and the corresponding Fourier-transformed images. The nanoporous structure could be produced for all the voltage conditions, but the well-ordered through-hole pore without a branched structure seemed to occur only at 40 and 140 V. It turned out that the growth rate under 140 V high-field anodization was about 40 times higher than under conventional 40 V mild anodization, which enabled the fast fabrication of self-ordered, high aspect ratio NAAMs.