Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)

The Korean Institute of Surface Engineering (한국표면공학회)
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Film Structure Modification in Conventional and Pulsed Dc Magnetron Sputtering

  • Kusano, Eiji (Advanced Materials Science Research Center Kanazawa Institute of Technology)
  • Published : 2011.05.19
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Abstract

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