Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2011.08a
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- Pages.127-127
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- 2011
Transparent Oxide Thin Film Transistors with Transparent ZTO Channel and ZTO/Ag/ZTO Source/Drain Electrodes
- Choi, Yoon-Young (Department of Advanced Materials Engineering for Information and Electronics, Kyung Hee University) ;
- Choi, Kwang-Hyuk (Department of Advanced Materials Engineering for Information and Electronics, Kyung Hee University) ;
- Kim, Han-Ki (Department of Advanced Materials Engineering for Information and Electronics, Kyung Hee University)
- Published : 2011.08.17
Abstract
We investigate the transparent TFTs using a transparent ZnSnO3 (ZTO)/Ag/ZTO multilayer electrode as S/D electrodes with low resistivity of