Characteristic analysis and design of a precise manipulation device using surface acoustic wave

표면탄성파를 이용한 이송장치의 IDT 형상 변화에 따른 특성 연구

In this paper, SAW devices are fabricated using various IDT shape(Single/Double) to check an effect of the IDT on SAW device. And based on theory of a particle velocity moved by SAW and IDT, a particle velocity is measured and calculated. Depend on insert power, a particle velocity using Single-IDT SAW device is about two times bigger than Double-IDT SAW device and it's almost same with a theoretical different.