Optimization and dynamic characteristics of the hybrid type vacuum pump

하이브리드 타입 진공펌프의 동특성 및 최적화

  • Published : 2014.10.29

Abstract

The purpose of this study is the stability evaluation of a vacuum pump through modal test and rotor dynamics. Eigenvalue was solved by the finite-element method(FEM) using 2D and 3D models, then the modal test result was compared with the FEM result. According to the comparison, the analysis result using the 2D was more accurate than the 3D model. Therefore, rotor dynamics was performed by the 2D model. Campbell diagram and root-locus maps, which were calculated by complex-eigenvalue analysis, were used to evaluate the stability of the rotors of the vacuum pump. And displacement solved by unbalance response analysis was compared with the minimum clearance between two rotors of the vacuum pump. Thus, the vacuum pump is assumed operated under steady state through the evaluation of the rotor dynamics.

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