Elastic modulus measurement of thin films using laser generated guided ultrasonic waves

레이저 초음파 기법을 이용한 박막 탄성계수 측정

Regarding thin films in MEMS/NEMS structures, the exact evaluation of mechanical properties is very essential to enhance the reliability of their design and manufacturing. However, such methods as a tensile test and a resonance test, general methods to measure elastic moduli, cannot be applied to thin films since its thickness is so small. This work concerns guided wave based elastic modulus measurement method. To this end, guided wave excitation and detection system using a pulsed laser and a laser interferometry has been established. Also an elastic modulus extraction algorithm from the measured guided wave signal was developed. Finally, it was applied to actual thin film structures such as Ni-Si and Al-Si multilayers. From experimental results, we confirm that the proposed method has considerable feasibility to measure elastic properties of thin films.