Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
권호 표지

The Characteristics of Pyrolytic Carbon Deposited in a Fluidized Bed by CVD

Fluidized Bed에서 화학증착법에 의해 증착된 열분해 탄소의 특성

  • 승성표 (한국과학기술원 재료공학과) ;
  • 이재영 (한국과학기술원 재료공학과) ;
  • 진억용 (아주대학교 재료공학과)
  • Published : 1984.02.01
Download PDF
⟨ Previous Next ⟩

Abstract

The characteristic of pyrolytic carbon deposited in a fluidized bed as measured by density apparent crystallite size and viewed metallographically under polarized light can be easily controlled by adjusting the deposition parameters such as deposition temperature and propane flow rate or silicon content. The density of isotopic pyrolytic carbons deposited from propane between 120$0^{\circ}C$ and 140$0^{\circ}C$ increases with increasing propane flow rate and decreasing deposition temperature from 1, 73g/cc to 2.08g/cc. The apparent crystallite size Lc parameter appears to depend only on deposition temperature being entirely independent of the propane flow rate. The carbon matrix density of the silicon-alloyed carbonds deposited from propane and methyltrichlorosil-ane from 2.05g/cc for a silicon content around 9wt% to 2.67g/cc for a silicon content of 36.7wt% The Lc parameter of the deposition temperature being entirely independent of the silicon content.

Keywords

References

  1. Marcel Dekker v.1 Chemistry and Physics of Carbon H.B. Palmer;C.F. Cullis;P.L. Walker(ed.)
  2. Carbon v.10 no.369 Carbon-An Old but New Materials P.L. Walker, Jr.
  3. AFRDL-TR-74-15 Interim Report for Period Dec. 1972-Jan. 1974 Martin C. Hughes(et al.)
  4. Carbon v.15 no.33 Biomedical applications of Carbon fibre reinforced carbon in implanted Prostheses Gywn M. Genkins
  5. Nucl. Sci. Eng. v.20 no.201 Development and Utilization of Pyrolytic-Carbon-Coated Carbide fuel for the high-temperature gas-cooled reactor W.V. Goodel
  6. Chemistry and Physics of Carbon v.5 J.C. Bokros;P.L. Walker(ed.)
  7. Carbon v.15 no.355 Carbon biomedical devices J.C. Bokros
  8. Carbon v.21 no.523 A study of the properties of pyrolytic carbons deposited from propane in a tumbling bed and stationary bed between 900℃ and 1230℃ J.Y. Lee;J.H. Je;W.S. Ryu;H.S. Kim
  9. Carbon v.10 no.571 J.L. Kaae;J.C. Bokros;D.W. Stevens
  10. Carbon v.12 no.171 R.J. Price;K. Koyama
  11. Carbon v.12 no.439 The deposition of pure and alloyed isotropic carbons in steady state fluidized beds R.J. Akins;J.C. Bokros
  12. 한국공업규격 KS D 1804
  13. J. Nucl. Mater. v.19 no.81 R.J. Gray;J.V. Catheart
  14. J. Am. Ceram. Soc. v.51 no.424 Depostion and microstructure of vapor-deposited silicon carbide T.D. Gulden
  15. ORNL-TM-1649 Pyrolytic carbon deposited from propane in a fluidized bed R.L. Beatty
  16. Carbon v.3 no.201 Variation in the crystallinity of carbons deposited in fluidized beds J.C. Bakros
  17. The vapor pressures of pure substances T. Boublik;V. Fried;E. Hala
  18. Carbon v.12 no.218 The influence of chlorine on the formation and properties of pyrolytic carbon C.F. Cullis;A.C. Norris
  19. Nucl. Tech. v.35 no.301 Transmission electron microscopy of pyrocarbon coatings E. Pollmann;J. Pelissier;C.S. Yust;J.L. Kaae
  20. J. Am. Cer. Soc. v.54 no.605 Structure and mechanical properties of codeposited pyrolytic C-SiC alloys J.L. Kaae;T.D. Gulden
  21. Carbon v.9 J.C. Bokros;D.W. Stevens;R.J. Akins