A Study on Calculation of Capacitance Parameter for Interconnection Line in Multilayer Dielectric Media

다층 유전체 매질에서의 Interconnection Line에 대한 Capacitance Parameter 계산에 관한 연구

In this paper, a method for computing the capacitance parameter for a multi-interconnection line in a multilayered dielectric region is presented. The number of interconnection lines and the number of dielectric layers are arbitrary, and the interconnection lines are finite cross section or infinite cross section. The surface of lines and dielectric interface are divided into subsection. The surface charge density of each subsection is a constant step-pulse function for each subsection. After the solution of surface charge density is effected by the method of moments, capacitance parameter is calculated.