Performance Analysis and Modifications of Axi-Symmetric Electrostatic Lens for Sub-Micron Ion Beam System

Sub-micron의 이온빔 직경을 가지는 축대칭 정전렌즈의 성능 해석 및 개선

We analyzed electrostatic lens with axi-symmetic configurations using the analytic equation for a single apertured lens. The developed computer code afforded to estimate ion optical properties such as ion trajectories, aberrations and ion beam diameters, and was found to have advantages of a shorter calculation time. The calculated ion optical properties for several types of electrostatic lens were in good agreement with Burghard's ones and it was seem that 20% reduction of ion beam diameter could be obtained by the change of aperture diameters.