Abstract
Laser plasma was generated by a 1GW iodine photodissociation laser ($\lambda$=1.315$\mu\textrm{m}$, E=12.7J) whose output beam was focused on a molybdenum target surface. The experiment was conducted in a vacuum chamber under 1D-sTorr and several tens of laser shooting were necessary for sufficient exposure for the PBS resist of 111m thickness. Aluminium was coated on the top of the resist by 0.1$\mu\textrm{m}$ thickness which acts as an X-ray filter to cut off the visible and the ultraviolet lights. A bio-specimen was put directly on the aluminium coated resist and located at a distance of 3 cm from the X-ray source. The replicas of a steel mesh, spider's web. and a red blood cell were obtained by this technique and were observed by Nomarski microscope and SEM. The limitation of its resolution is determined by the X-ray source size and Fresnel diffraction effect, and its theoretical prediction is well matched with the experimental results. In this experiment, a resolution better than 0.1$\mu\textrm{m}$ could be obtained. ained.
Soft X-ray는 자연상태의 생물체를 높은 대비(high contrast)의 영상으로 관찰할 수 있는 광원이다. 1GW급의 광분해 옥소레이저 ($\lambda$=1.315$\mu\textrm{m}$, E=12.7J)를 몰리브덴(Mo) 표적에 집속시켜 플라즈마를 발생시켰으며 플라즈마에서 방출되는 넓은 파장 영역의 연속스펙트럼을 0.1$\mu\textrm{m}$ 두께의 알루미늄 필터를 거치게 하여 soft X-ray 영역에 중심세기를 갖는 광원을 얻었다. X-ray용 resist로 감도가 좋은 PBS를 사용하여 그물망(mesh), 거미줄, 적혈구의 replica를 얻었다. 본해능에 미치는 두 가지의 주된 영향인 광원의 크기에 의한 영향과 Fresnel 회절효과를 고찰하고 실험결과를 비교하였다. 본 실험에서는 0.1$\mu\textrm{m}$이하의 분해능을 얻었다.
