Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
권호 표지

Composition Control and Annealing Effects on the Growth of YBaCuO Superconducting Thin Films by RF Magnetron Sputtering

RF Magnetron Sputtering 방법에 의한 고온 초전도 박막 제조를 위한 조성 조절 및 열처리 효과

  • 한택상 (한국과학기술연구원 초전도연구실) ;
  • 김영환 (한국과학기술연구원 초전도연구실) ;
  • 염상섭 (한국과학기술연구원 초전도연구실) ;
  • 최상삼 (한국과학기술연구원 초전도연구실) ;
  • 박순자 (서울대학교 무기재료공학과)
  • Published : 1990.02.01
Download PDF
⟨ Previous Next ⟩

Abstract

High Tc Supperconducting thin films were fabricated by rf magnetron sputtering method. We have successfully controlled the compositions of films by adding sintered CuO pellets on YBa2Cu3O7-x single target. High Tc thin films with large grian size and good crystal habit were obtained by rapid thermal annealing process. The films deposited on SrTiO3(100) single crystal substrate indicated the existence of c-axis prefered orientation confirmed by XRD and SEM analysis. The Tc, zero's of sharp resistive transition for rapid annealed films deposited on polycrystalline YSZ substrate and on SrTiO3(100) single crystal substrate were 79K and 88K, respectively.

Keywords

References

  1. Jpn. J. Appl. Phys. v.26 no.L709 Preparation and Characterization of Superconducting Y-Ba-Cu-O Thin Films H. Adachi;K. Setsune;T. Mitsuyu;K. Hirochi;Y. Ichigawa;T. Kamada;K. Wasa
  2. Jpn. J. Appl. Phys. v.26 High $T_c$ Y-Ba-Cu-O Thin Films Prepared by dual Magnetron Sputtering H. Asano;K. Tanabe;Y. Katoh;S. Kubo;D. Michikami
  3. Phys. Rev. v.B35 Thin Superconducting Oxide Films R.B. Laibowitz;R.H. Koch;P. Chaudrahi;R.J. Gambino
  4. Phys. Rev. Lett. v.58 Critical-Current Measurements in Epitaxial Films of YBa₂Cu₃$O_{7-x}$ Compound P. Chaudrahi;R.H. Koch;R.B. Laibowitz;T.R. Mcguire;R.J. Gambino
  5. Appl. Phys. Lett. v.51 Preparation of Y-Ba-Cu Oxide Superconductor Thin Films Using Pulsed Laser Evaporation from High $T_c$ Bulk Material D. Dijkkamp;T. Venkatesan;X.D. Wu;S.A. Shaheen;N. Jiswari;Y.H. Min-Lee;W.L. McLean;M. Croft
  6. Appl. Phys. Lett. v.52 Low-Temperature Preparation of High $T_c$ Superconducting Thin Films X.D. Wu.;A. Inam;T. Venkatesan;C.C. Chang;E.W. Chase;P. Barboux;J.M. Tarascon;B. Wilkens
  7. Appl. Phys. Lett. v.51 Growth of High $T_c$ Superconducting Thin Films Using Molecular Beam Epitaxy Techniques C. Webb;S.L. Weng;J.N. Eckstein;N. Missert;K. Char;D.G. Schlon;E.S. Hellman;M.R. Beasley;J.S. Hanis
  8. Jpn. J. Appl. Phys. v.28 Preparation of Bi-Sr-Ca-Cu-O Superconducting Films by CVD H. Yamane;H. Kurosawa;H. Iwasaki;Y. Muto
  9. Appl. Phys. Lett. Preparation of Y-Ba-Cu-O Superconducting Thin Films Using BaF₂ as a Buffer Layer F. Radpour;R. Singh;S. Sinha;A.M. Tulpule;P. Chou;R.P.S. Thakur;M. Rahmati;N.J. Hsu;A. Kumar
  10. Appl. Phys. Lett. v.53 Low-Loss Substrate for Epitaxial Growth of High-Temperature Superconductor Thin Films R.W. Simon;C.E. Platt;A.E. Lee;G.S. Lee;K.P. Daly;M.S. Wire;J.A. Luine;M. Urbanik
  11. Appl. Phys. Lett. v.53 Epitaxial Y-Ba-Cu-O Films on Si with Intermediate Layer by RF Magnetron Sputtering S. Miura;T. Yoshitake;S. Matsubara;Y. Miyasaka;N. Shohata;T. Satoh
  12. Appl. Phys. Lett. v.53 Reliable Single-target Sputtering Process for High-Temperature Superconducting Films and Devices R.L. Sandstrom;W.J. Gallapher;T.R. Dinger;R.H. Koch;R.B. Laibowitz;A.W. Kleinsasser;R.J. Gambino;M.F. Chischolm
  13. Appl. Phys. Lett. v.52 In-situ Resistance of $Y_1Ba_2Cu_3O_x$ Films During Annealing A. Davidson;A. Palevski;M.J. Brady;R.B. Laibowitz;R. Koch;M. Scheuermann;C.C. Chi
  14. Appl. Phys. Lett. v.53 High $T_c$ Superconducting Thin Films by Rapid Thermal Annealing of Cu/BaO/Y₂O₃ Layered Structures Q.Y. Ma;T.J. Licata;X. Wu;E.S. Yang
  15. Appl. Phys. Lett. v.51 Production of YBa_2Cu_3O_{7-y}$ Superconducting Thin Films In-situ by High-Pressure Reactive Evaporation and Rapid Thermal Annealing D.K. Lathrop;S.E. Lussek;R.A. Buhrman
  16. Appl. Phys. Lett. v.53 Reaction of $Ba_2YCu_3O_{6.9}$ Films with Yttria-Stabilized Zirconia Substrates M.J. Chima;J.S. Schneider;S.C. Peterson
  17. The 11th Workshop on High Tc Superconductivity Plasma Luminescence Spectroscopy for RF-sputtering Growth of $YBa_2Cu_3O_{7-x}$ S.S. Yom;T.S. Hahn;Y.H. Kim;H. Chu;S.S. Choi