Abstract
This paper describes the factors which control the impedance-relative humidity characteristics of the TiO2-V2O5 humidity sensor. To obtain the quantitative relationships between impedance and many manufacturing parameters such as V2O5mol%, the sintering time and temperature, various sets of samples are preared and tested. With changing relative hymidity from 20% to 80%, it is measrued that the corresponding capacitance and impedance from the semicircles which complex impedance plots make. As a result we found that the impedance-relative humidity characteristics are mainly controlled by the doping amount of V2O5 total pore volume and bulk resistence of the elements. We can assume the equivalent circuits of each samples and finally control the sintering time to get a linear humidity impedance response curve which plays an important role in device making. 4mol% V2O5-TiO2 specimen sintered at 90$0^{\circ}C$ for 10min. show liear log(Z) vs. RH characteristics and 10mol% V2O5-TiO2 specimen sintered at the same temp. for 20min. show linear (Z) vs. RH.