수직 층류형 클린룸의 바닥 패널이 실내기류에 미치는 영향

Effects of the Floor Pannel on Flows in a Vertical Laminar Flow Type Clean Room

Uniformity of velocity is quite important design points of a vertical laminar flow type clean room. In the present paper, flows in a room with a bottom pannel are numerically simulated by using a low-Reynolds number $k-{\epsilon}$ model, and a new flow model of the pannel are suggested. Resistance coefficient of the pannel and size of the exhaust channel show considerable effects on flow pattern and uniformity of flow on the bottom. Reflection coefficient also has important roles. A possibility to obtain the uniform and unidirectional flow is tested by adjusting the distribution of resistance coefficient of the pannel. Such a numerical simulation of the flow will be a good method to get optimun design parameters.