Fabrication of SnO2-TiO2-based Thick Films for Hydrocarbon Gas Sensors

탄화수소계 가스센서를 위한 SnO2-TiO2계 후막의 제조

  • Published : 1991.09.01

Abstract

SnO2-TiO2(Pt or Pd), as raw material for hydrocarbon gas sensors, was prepared by a coprecipitation method. The SnO2-TiO2-based thick film gas sensors were made by screen printing technique. The titanium dioxide synthesized was shown to be anatase structure from XRD peaks and was transformed to rutile structure between 700$^{\circ}C$ and 1000$^{\circ}C$. Titanium dioxide in SnO2-TiO2 thick films devices plays a very important role in the enhancement of the sensitivity to CH4 and C4H10. In the case of SnO2-TiO2(Pt) sensors, titanium dioxide that was rutile structure enhanced the sensitivity of the thick film to CH4. Platinum added to the raw powder at coprecipitation (as chloroplatinic acid VI hydrate) improved the gas sensitivity to hydrocarbon gases. Therefore, it is expected that the SnO2-TiO2(Pt) thick film sensors fabricated in this experiment could be put into practical use as LPG (primary component : C4H10 and C3H8) and LNG (primary component : CH4) sensors.

Keywords

References

  1. Anal Chem. v.34 A New Detector for Gaseous Components Using Semiconductive Thin Films T. Seiyama;A. Kato;K. Fukrishi;M. Nagatini
  2. J. Chem. Soc. Faraday Trans. v.84 no.2 Tin Dioxide Gas Sensors-Part 2. The Role of Surface Additives J.F. McAleer(et al.)
  3. Proceedings of the 3rd International Meeting on Chemical Sensors Preparation, Structure and Gas Sensing Properties of SnO₂-ZnO Complex Oxide Shen(et al.)
  4. 요업학회지 v.27 no.1 공침법 및 열분해에 의한 La-modified PbTiO₃요업체의 제조 이병우;오근호
  5. Thin Solid Films v.200 Characteristics of α-Fe₂O₃Thick Film Gas Sensors Wan-Young Chung;Duk-Dong Lee
  6. 요업학회지 v.27 no.2 수산화물과 옥살산염의 열분해에 의한 SnO₂미분말의 합성 이종훈;박순자
  7. 응용물리 v.3 no.1 α-Fe₂O₃후막감지소자의 제조방법이 그 미세구조와 가스감지특성에 미치는 영향 정완영;이덕동;정형전
  8. X-ray Diffraction Procedures(2nd Ed.) H.P. Klug;L.E. Alexander
  9. J. Chem. Soc. Faraday Trans. v.1 no.71 Tin Oxide Surfaces-Part 2 P.G. Harrison;E.W. Thornton
  10. Ceramic Bulletin v.63 no.5 Fabrication and Performance Evaluation of a Titania Automotive Exhaust Gas Sensor A.L. Micheli
  11. J. Am. Ceram. Soc. v.70 no.4 Effect of Antimony Oxide on the Anatase-Rutile Transformation in Titanium Dioxide R.A. Eppler
  12. Sensors and Actuators v.20 Gas-Sensing Characeteristics of $SnO_{2-x}$ Thin Films with Added Pt Fabricated by the Dipping Method Duk-Dong Lee;Wan-Young Chung
  13. Advanced Inorganic Chemistry(5th Ed.) F.A. Cotton;G. Wilkinson
  14. J. Chem. Soc. Faraday Trans. Ⅰ v.8 Tin Dioxide Gas Sensors-Part 1. Aspects of the Surface Chemistry Revealed by Electrical Conductance Variations J.F. McAleer(et al.)
  15. Proc. of Int. Meet on Chemical Sensors Gas Sensing Characteristics of Porous Zinc Oxide Ceramic with and without Platium Catalyst H. Yanagida(et al.)
  16. Transducers Sensing Mechanism of Oxide Semiconductor Gas Sensors N. Yamazoe;T. Seiyama
  17. Solid State Gas Sensors P.T. Mosely;B.C. Totield(ed.)