Study of Laser Ablated Y-Ba-Cu-O Thin Films on $LaAlO_3$(100)Substrates

Laser Ablation에 의하여 $LaAlO_3$(100) 기판 위에 증착된 Y-Ba-Cu-O 박막에 대한 연구

  • Published : 1991.12.01

Abstract

Y-Ba-Cu-O thin films were in-situ fabricated on LaAlO3(100) substrates using the second harmonics of a pulsed Nd:YAG laser. Thin films were deposited under 200 (mtorr) of oxygen atmosphere, when the substrate temperature was changed between 67$0^{\circ}C$ and 82$0^{\circ}C$. After deposition, the films were in-situ annealed at 50$0^{\circ}C$ under 2/3 bar of oxygen pressure. We showed that the deposition temperature affects the formation of superconducting phase, the resistance, and the surface morphology. The Y-Ba-Cu-O thin films deposited at 76$0^{\circ}C$ show the zero resistance critical temperature of 85 K.

Keywords

References

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