COMPOSITIONAL DEPENDENCE OF $128^{\circ}$ Y CUT $LiNbO_3$ CRYSTALS ON SAW CHRACTERISTICS

$128^{\circ}$ Y Cut $LiNbO_3$단결정의 조성비 변화에 따른 SAW특성변화

In order to measure the characteristics of Surface Acousitc Wave(SA W) with compositions of $LiNbO_3$ single crystal, $128^{\circ}$ Y cut wafer was fabricated from $LiNbO_3$ single crystals with the composition range of 47-50 $Li_2O$mol%. Delay lines were formed on the $128^{\circ}$ Y cut wafer using photolithography technique. Delay time was measured by pulse-echo overlap method. The compositional dependence of SAW characteristics, SAW velocity, electro-mechanical coupling coefficient$(K_s^2)$ and temperature coefficient of delay time(TCD), were investigated.

$LiNbO_3$단결정의 조성비 변화에 따른 탄성표면파 특성을 축정하기 위해 47-50 $Li_2O$ mol% 조성의 $LiNbO_3$단결정을 성장시켜 $128^{\circ}$Y cut wafer를 제조하였다. 제작된 wafer 위에 사진식각법을 이용하여 지연선(Delay line)을 형성시켰다. Pulse-echo overlap mehtod로 지연시간을 측정하여, 탄성표면파 속도$(V_s)$, 전기기계결합계수$(K_s^2)$ 및 $-50^{\circ}C~100^{\circ}C$ 온도 범위에서 지연시간 온도계수(TCD)의 조성비에 대한 의존성을 조사하였다.