Abstract
$SrTiO_3$powders were synthesized from the chloride and the nitrate aqueous solution by spray pyrolysis method using ultrasonic vibrator. The concentration of mother solution was prepared 0.05M and O.lM. The carrier gas flow rate was 0.5cm/sec and 1.5cm/sec, respectively. The formation processing was investigated in the 0.05M and 0.05cm/sec. The $SrTiO_3$powders could not be synthesized from chloride aqueous solution. The prepared powders from nitrate aqueous solution was SrTi03 with cubic structure and nearly sphere particle for all samples. Mean particle size was increased from $0.49{\mu}m$ to $0.67{\mu}m$ by changing the carrier gas flow rate from O.5cm/sec to 1.5cm/sec. Also, mean particle size increased from $0.49{\mu}m$to $0.55{\mu}m$by changing the concentration of mother solution from O.05M to O.1M. Atomizing droplet size was $14.3{\mu}m$. The shape of particles was very porous by evaporation of solvent at the initial step. But through the each step upwards, shape of particles was formed themselves into a nearly roundish.
$SrTiO_3$미분말은 초음파 분무 열분해법으로 chloride와 nitrate 수용액을 출발용액으로 사용하여 농도를 0.05M과 0.1M로 하였으며 각 농도에 따른 유속의 변화를 0.5cm/sec로 변화시켜 합성하였다. 분말의 형성 과정은 0.05M, 0.05cm/sec 조건에서 단계별 분말을 합성하여 주로 morphorlogy 측면에서 고찰하였다. 출발용액이 chloride 수용액인 경우 SrTiO$_3$미분말을 합성할 수 없었으며 nitrate 수용액인 경우 모든 조건에서 (110)면을 주 peak로 하는 cubic의 순수한 구형의 $SrTiO_3$미분말을 얻을 수 있었다. 평균입자의 크기는 유속이 증가함에 따라 $0.49{\mu}m$에서 $0.55{\mu}m$로 증가하였다. 출발액적의 크기는 $14.3{\mu}m$이었으며 단계별 입자의 형태는 1, 2단계에서 용매의 증발에 의해 매우 porous하였으며 불규칙하였고, 3, 4, 5단계를 지나는 동안 점차 둥근 형태로 형성되었다.