Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Electrical and Optical Properties of Sb-doped SnO2 Films Prepared by Chemical Vapor Deposition

화학증착법에 의해 제조된 Sb-doped $SnO_2$ 박막의 전기적 및 광학적 특성

  • 이수원 (부산대학교 무기재료공학과) ;
  • 김광호 (부산대학교 무기재료공학과)
  • Published : 1992.04.01
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Abstract

Sb-doped SnO2 films were formed on Corning glass 7059 substrate by chemical vapor deposition using simulataneous hydrolysis of SnCl4 and SbCl5. Fairly good transparent conducting film with a low resistivity of ~6$\times$10-4{{{{ OMEGA }}cm and high average optical transparency above ~85% in the range of visible light was obtained at the deposition condition of 50$0^{\circ}C$ and input-gas ratio, [Psbcl5/Psncl4] of 0.05. Film conductivity was improved without loosing optical transparency at light doping of Sb and found to be due to the increase of electron concentration. However, high doping of Sb into SnO2 film largely deteriorated conductivity, optical transparency and crystallinity of the film.

Keywords

References

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