Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
권호 표지

A Study on the TiN Thin Film by Sol-Gel Method

졸-겔 방법으로 제조한 TiN 박막에 관한 연구

  • 김왕섭 (고려대학교 재료공학과) ;
  • 선효님 (한국과학기술연구원 세라믹스공정실) ;
  • 김경용 (한국과학기술연구원 세라믹스공정실) ;
  • 김병호 (고려대학교 재료공학과)
  • Published : 1992.04.01
Download PDF
⟨ Previous Next ⟩

Abstract

TiO2 sols were prepared by hydrolysis and polymerization of titanium tetra-isopropoxide (TTIP) in the presence of diethanolamine (DEA). The optimal mole ratio of water to TTIP is 2 and the concentration of the TiO2 sol 0.7 M. Golden TiN films without cracks were obtained by dipping Si(110) wafers into the TiO2 sol and followed by nitridation in NH3 at 1100$^{\circ}C$ for 5 h. The TiN films were studied by an optical microscope, DTA, TGA and X-ray analysis.

Keywords

References

  1. J. Mater. Sci. v.23 Dip Coating of TiO₂Films Using a Sol derived from Titaniumisopropoxide-Diethylamine-H₂O-Isopropylalcohol System Y. Takahashi;Y. Matsuoka
  2. J. Mater Sci. Lett v.5 Preparation of TiO₂ Fibers by Hydrolysis and Polycondensation of Ti(O-₁C₃$H_{7}$) K. Kamiya;K. Tanimoto;T. Yoko
  3. J. Mater. Sci. v.22 Nitridation of TiO₂Fibers Prepared by the Sol-Gel Method K. kamiya;T. Yoko;M. Bessho
  4. 日本 セラミノクス 協會學術論文誌 v.98 no.11 Nitridation of TiO₂ Coating Films Applied on S₁O₂Galss by the Sol-Gel method K. Kohno;M. Konishe
  5. The Phsyics and Chemistry of Sol-Gel Processing Sol-Gel Science C.J. Brinker;G.W. Scherer
  6. Gorham Advanced Materials Institute Dec. Sol-Gel Production of High Performance Ceramics and Glass, Inter. Conference
  7. J. Am. Ceram. Sci. v.73 no.9 Nitridation of Sol-Gel Derived Titanium Oxide Films by Heating in Ammonia Gas K. Kamiya;T. Nishjima;K. Tanaka