Surface Flatness Test using 2-Bucket Algorithm Phase-shifting Interferometry

2-Bucket 알고리즘 위성 전이 간섭계를 이용한 평면 편평도 측정

In this paper, a measurement system of surface flatness test using 2-Bucket algorithm phase-shifting interferometry is designed and constructed. In the conventional surface flatness test system using phase shifting interferometry, it is needed more than 3 fringe datas but we propose 2-Bucket algorithm phase-shifting interferometry which only uses two fringe datas. 2-Bucket algorithm uses the relative phase differences of the neighbour pixels. If we watch the result of phase-shift error test simulation, 2-Bucket algorithm has the same calculating values that 3-Bucket, 4-Bucket and 5-Bucket algorithm have them. Experiments have been carried out on the silicon wafer. The measurement of silicon wafer's surface flatness shows that the flatness topography using 2-Bucket algorithm is similar to that of other algorithms.