Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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The Hydrogen Gas Sensing Characteristics of the Pd-doped $SnO_2$ Thin Films Prepared by Sputtering

스퍼터링법으로 제조된 Pd-doped $SnO_2$ 박막의 수소가스 감도 특성

  • 차경현 (부산대학교 공과대학 무기재료공학과) ;
  • 김영우 (부산대학교 공과대학 무기재료공학과) ;
  • 박희찬 (부산대학교 공과대학 무기재료공학과) ;
  • 김광호 (부산대학교 공과대학 무기재료공학과)
  • Published : 1993.09.01
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Abstract

Pd-doped SnO2 thin films for hydrogen gas sensing were fabricated by reactive fo magnetron sputtering and were studied on effects of film thickness and Pd doping content. Pd doping caused the optimum sensor operation temperature to reduce down to ~25$0^{\circ}C$ and also enhanced gas sensitivity, compared with undoped SnO2 film. Gas sensitivity depended on the film thickness. The sensitivity increased with decreasing the film thickness, showing maximum sensitivities at the thickness of 730$\AA$ and 300~400$\AA$ for the undoped SnO2 and the Pd-doped SnO2 film, respectively. Further decrease of the film thickness beyond these thickness ranges, however, resulted in the reduction of sensitivity again.

Keywords

References

  1. IEEE Trans.(Electron Devices) v.ED-26 no.3 Thick-film CO Gas Sensors M. Nitta;M. Haraddome
  2. J. Am. Cerm. Soc. v.68 no.1 Gas Sensing Characteristics of Porous ZnO and Pt/ZnO Ceramics S. Saito(et al.)
  3. J. Kor. Ceram. Soc. v.23 no.5 γ-Fe₂O₃ Ceramic Sensor : Effect of Specific Surface Area on the Gas Sensitive Properties J.U. Shin;S.J. Park
  4. Denki Kagaku v.40 no.3 Gas Detection by Activated Semiconductive Sensor T. Seiyama(et al.)
  5. Transducers 87 v.605-609 Comparision of the Thermomechanical Behavior and Power Consumption between Different Integrated Thin Film Gas Sensor V. Demarne;A. Grisel
  6. Transducers '87 v.610-613 A Study of Detection Mechanism in the Pd-$SnO_x$ MIS Oxygen Sensor W.P Kang(et al.)
  7. Proc. 3rd Intn' Meeting on Chemical Sensors v.39-43 H₂S Moniterings as Air Pollutant with Silver Doped SnO₂ Thin Film Sensors V. Lantto
  8. J. Electrochem. Soc. v.138 no.8 Electrical Properties and Gas-Sensing Behavior of SnO₂ Films Prepared by Chemical Vapor Deposition K.H. Kim;C.G. Park
  9. J. Electronic Mat. v.9 no.1 Thin Films of SnO₂ as Solid State Gas Sensor G.V. Advani;A.G. Jordan
  10. Surface Sci. v.193 no.109-131 Reactions between Hydrocarbons and an Oxygen Covered Palladium Surface H. Dannetun(et al.)
  11. Proc. 3rd Intn'l Conf. Solid State Sensors and Actuators (Transducers 1985) v.376-379 Sensing Mechanism of Oxide Semiconductor Gas Sensors N. Yamazoe(et al.)
  12. Surface Sci. v.189 no.91-105 Theoretical Aspects of Surface Reaction J.K. Norskov;P. Stoltze
  13. Sensors and Actuators v.17 no.355-359 Spillover Effects in the Detection of H₂ and CH₄ by Sputtered SnO₂ Films with Pd and PdO Deposits R. Huck(et al.)
  14. J. Cera. Soc. Jpn. v.97 Hydrogen Gas Sensing Properties in Polycrystalline Tin Oxide Films of Submicron Thickness T. Suzuki;T. Yamazaki;M. Azumaya
  15. J. Electrochem. Soc. v.126 no.4 A Model for the Operation of a Thin Film $SnO_x$ Conductance-Modulation Carbon Monooxide Sensor H. Windischman;P. Mark
  16. Sensor and Actuators v.B3 no.69-74 Effects of Thickness and Additives on Thin-Film SnO₂ Gas Sensors J. Klober(et al.)