Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
권호 표지

Effect of Substrate Temperature on the Properties of ZnO Transparent conducting Thin Film Prepared by the Vapour Spraying Method

분사증기법에 의해 형성된 ZnO 투명전도막에서 기판온도가 막 특성에 미치는 영향

  • 이환수 (서울대학교 공과대학 금속공학과) ;
  • 주승기 (서울대학교 공과대학 금속공학과)
  • Published : 1994.04.01
Download PDF
⟨ Previous Next ⟩

Abstract

ZnO transparent conducting thin film, which is a strong candidate for a transparent electrical contact in optoelectronic devices, was prepared by the vapour spraying method on the slide glass in nitrogen ambient at the atmospheric pressure. The structural, optical and electrical properties of films show a strong dependence on substrate temperature, and the optimum range of deposition temperature existed to obtain TCO(Transparent Conducting Oxide) films. At the higher temperatures, milky films were obtained. In such optimum range, the bandgap in ZnO films was determined from the spectral dependence of absorption coefficient and electrical characteristics were characterized with by the Hall mobility and carrier concentration.

Keywords

References

  1. J.Appl.Phys. v.62 no.912-916 Degradation of Tin-Doped Indium-Oxide Film in Hylldrogen and Argon Plasma R.Banerjee;S.Ray;N.Basu;A.K.Batabyal;A.K.Barua
  2. J.J.Appl.Phys v.20 no.L783-L786 Degradation of ITO Film in Glow-Discharge Plasma O.Kuboi
  3. Appl.Phys.Lett v.35 no.930-931 The Use of ZnO in Transparent Type MIS Solar Cells P.Petrou;R.Singh;D.E.Brodie
  4. J.Electrochem.Soc v.128 no.2684-2686 Semiconducting Zinc Oxide Films Prepared by Metal Organic Chemical Vapor Depostion from Diethyl zinc P.P.Roth;D.F.Wiliams
  5. Appl.Phys.Lett v.43 no.1108-1110 Melalorganic Chemical Vapor Deposition of Oriented ZnO Films Over Large Areas Frankk;T.J.Smith
  6. Appl.Phys.Lett v.39 no.640-642 Transparent and Highly Conductive Films of ZnO Prepared by rf Reactive Magnetron Spultering J.B.Webb;D.F.Williams;M.Buchanan
  7. J.Appl.Phys v.55 no.1029-1034 Electrical and Optical Properties of Zinc Oxide Thin Films Prepared by rf Magnetron Sputtcring for Transparcnt Electrode Applications H.Nanto;T.Mmami;S.shooji;S.Takata
  8. 대한금속학회지 v.29 no.182-771 Air Curtam에 의한 산소차폐효과에 관한 연구 이승호;권제일;주승기;이우일;이준식;차승수
  9. Phys.Rew.Lett v.4 no.505-508 Piezoelectricity and Conductivity in ZnO and CdS A.R.Huston
  10. Solar Cells v.30 no.437-450 Texlured Fluorine-Doped ZnO Films by Atmospheric Pressure Chemical Vapor Deposition;Their Use in Amorphous Silicon Solar Cells J.Hu;R.G.Gordon
  11. Thin Solid Films v.199 no.223-233 The Effects of Zinc Diffusion on the Electrical and Optical Properties of ZnO Al Films Prepared by R.F.Reactive Sputtering Y.Igasaki;H.Saito
  12. Phys.Status Solidi v.15 no.627-643 Optical Properties and Electronic Structure of Amorphous Germanium J.Tauc;R.G.Rigorovici;A.Vancu
  13. Phys Rev v.93 no.632-633 Anomalous Optical Absorption Limit in InSb E.Burstein
  14. Proc.Phys.Soc v.B67 no.775 T.S.Moss
  15. Solar Energy Materials v.7 no.65 Electrical and Optical Properties of Bias Sputtered ZnO Thin Films O.Caporalleti
  16. Solid Stat.Commun v.39 no.1269 A.P.Roth;J.B.Webb;D.F.Williams
  17. J.Appl.Phys v.22 no.855-863 Some Electrical Properties of Zinc Oxide Semiconductor E.E.Hahn
  18. J.J.Appl.Phys v.52 no.L781-L784 GroupⅢ Inpurity Doped Zinc Oxide Thin Films Prepared by R.F.Magnetron Sputtering T.Minami;H.Sato;H.Nanto;S.Takata