Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
권호 표지

Study on the Formation of Superconducting Phases of $Bi_2Sr_2Ca_2Cu_3O_x$ Thin Films Prepared by Off-axis Sputtering

Off-axis Sputtering 방법으로 제조한 $Bi_2Sr_2Ca_2Cu_3O_x$ 박막의 초전도상 생성에 관한 연구

  • 심창훈 (포항공과대학교 재료금속공학과) ;
  • 양우석 (포항공과대학교 재료금속공학과) ;
  • 제정호 (포항공과대학교 재료금속공학과)
  • Published : 1994.07.01
Download PDF
⟨ Previous Next ⟩

Abstract

Off-axis supttering using shielder was used to efficiently prevent negative oxygen ions from resputtering deposited films. In this method, the substrate was located vertically to the target and shielded by the semicircled steel plate. By using this method, the resputtering could be reduced, and 2223 high-Tc phase could be formed at the lower substrate temperature and in the broader temperature region. As increasing the substrate temperature, 2212, 2223, 2212 superconducting phases were formed by turns. 2223 phase was formed above 2$\times$10-2 torr, and 2212 phase was formed above 4$\times$10-2 torr.

Keywords

References

  1. Jpn. J. Apple Phys. v.31 no.44 In Situ Growth of Bi-Sr-Ca-Cu-O Films by AC Sputtering in Pure Oxygen H. Yang;M. Kim;H. Horng
  2. Appl. Phys. Lett. v.55 Superconducting (Bi. Pb)-Sr-Ca-Cu-O Films Prepared In Situ by Laser Ablation Z. Ivanov;G. Brovsson
  3. Appl. Phys. Lett. v.57 Epitaxial Growth of Bi-Sr-Ca-Cu-O Superconducting Thin Films by Metalorganic Chemical Vapor Deposition T. Sugimoto;M. Yoshida;K. Yamaguchi;K. Sugawara;Y. Shiohara;S. Tanaka
  4. Jpn. J. Appl Phys. v.30 In Situ Preparation of Superconducting Bi₂Sr₂$Can_{-1}$$Cu_n$$O_y$(n=1~5) Thin Films by Molecular Beam Epitaxy Technique I. Tsukada;K. Uchinokura
  5. IEEE Transaction on Magnetics v.27 Off-Axis Magnetron Sputtering of YBCO Films: The Influenceof Atomic Oxygen A.C. Westereheim;L.S. Yu-Jahnes;A.C. Anderson
  6. Phy. Rev. B v.39 Oxygen concetration Effect on $T_c$ of the Bi-Ca-Sr-Cu-O Superconductor D.E. Morris;C.T. Hultgren;A.M. Makelz;J.Y.T. Wei;N.G. Asmar;J.H. Nickle
  7. Master thesis in Postech Study on the Resputtering by Oxygen and on the Formation of the Superconducting Phases for the In Situ Deposition of Bi-Sr-Ca-Cu-O Thin Films S.K. Park
  8. Vacuum v.43 The Effect of Resputtering on the In Situ Growth of Superconducting YBa₂Cu₃$O_λ$ Thin Films E.E. Inameti;M.S. Raven;Y.M. Wan;B.G. Murray
  9. J. Vac. Sci. Technol. A. v.10 The Effect of Oxidant on Resputtering of Bi from Bi-Sr-Ca-Cu-O Films J.M. Grace;D.B. McDonald;M.T. Reiten;J. Olson;R.T. Kampwirth;K.E. Gray
  10. Appl Phys. Lett. v.57 As-Grown Superconducting Thin Films of Bi(Pb)-Sr-Ca-Cu-O by magnetron sputtering Y. Hakuraku;S. Higo;T. Ogushi
  11. Physica C v.195 In Situ-Prepareation of Bi₂Sr₂Ca₂Cu₃O-Thin Films by DC-Sputtering P. Wangner;H. Adran;C. Tom-Rosa
  12. Appl. Phys. Lett v.60 High Temperature Superconducting YBa₂Ca₃$O_{7-λ}$ Films on Metalic Substrates Grown In Situ by Off-Axis Sputtering O.X. Jia;W.A. Anderson
  13. Physica C v.176 Variation of the Superconduction Properties of Bi₂Sr₂CaCu₂$O_{8+λ}$ with Oxygen Content G. Triscone;J. Genoud;T. Graf;A. Junod;J.Muller
  14. J Appl. Phys v.73 The Influence of Oxygen Partial Pressure and Temperature on Bi-Pb-Sr-Ca-Cu-O 110 K Superconductor Phase Formation and Its Stability W. Zhu;P.S. Nicholson
  15. Thin Film Processes Ⅱ Rf Diode Plasmas S.M. Rossnagel;J.L. Vossen(ed.);W. Kern(ed.)
  16. Jpn. J. Appl. Phys. v.31 Improved Surface Crystallinity of MgO Crystal Substrate Through Annealing in Oxygen Atmosphere T. Awaji;K. Sakuta;Y. Sakaguchi;T. Kobayshi
  17. Elements of X-ray Diffraction(2nd ed) B.D. Cullity
  18. Jpn J. Appl. Phys. v.29 Effect of Growth Temperature on Superconducting Phases of As-Grown BiSrCaCuO Thin Films Formed by Magnetron Sputtering K. Kuroda;K. Kojima;K. Yokoyama;K. Hamanaka
  19. Jpn. J Appl. Phys. v.29 As-Grown Crystallized Thin Films on Bi-Pb-Sr-Ca-Cu-O by Single-Target Magnetron Sputtering Y. Hakuraku;S. Higo;D. Miyagi;T. Ogushi
  20. Appl. Phys. Lett. v.54 Epitaxial Films Growths of artificial (Bi-O)/(Sr-Ca-Cu-O) Layered Stuctures J. Fujita;T. Tatsumi;T. Yoshitake;H. Igarashi
  21. Supercon. Sci. Technol. v.4 Effect of Pure Oxygen Sputtering Gas Pressure on the In Situ Growth of BiSrCaCuO Superconducting Thin Films Y. Hakuraku;K. Nagayama;T. Ogushi
  22. J Appl. Phys. v.72 Critical Current Density of High-quality Bi₂Sr₂Ca₂Cu₂$O_x$ Thin Film Prepared by Metalorganic Cemical Vapor Deposition H. Yamasaki;K. Endo;Y. Nakagawa;M. Umeda;S. Kosaka;S. Misawa;S. Yoshida;K. Kajimura
  23. Appl. Phys. Lett. v.57 In Situ Deposition of Superconducting Bi-Pb-Sr-Ca-Cu-O Thin Films on MgO(100) Substrates by RF Magnetron Sputtering and Laser Ablation J.S. Moodera;A.M. Rao;A. Kussmaul;P.M. Tedrow