A study on the fabrication and the electrical properties of TiO$_{2}$ thin films by Sol-Gel method

Sol-Gel법에 의한 $TiO_2$ 박막의 제작과 전기적 특성에 관한 연구

In this paper, $TiO_2$ thin films were fabricated by Sol-Gel method and their electrical conductivity and humidity sensing properties have been investigated. The structure of Sol can be changed by controlling for hydrolysis condition. The uniform surface of thin films was confirmed by SEM. The electrical conductivity of thin films decreased with increasing heat treatment temperature. The humidity sensing properties of thin films were good in high humidity and low frequency regions.