Prepatation of$(Ba_{0.5}, Sr_{0.5}) Tio_3$thin folms by Laser Ablation technique and their electrical properties with different electrodes

Laser Ablation에 의한 $(Ba_{0.5}, Sr_{0.5}) Tio_3$박막의 제조와 전극에 따른 전기적 특성

The chemical composition and electrical properties were investigated for epitaxially crystallized $(Ba_{0.5}Sr_{0.5})Tio_3$ (BST) films deposited on Pt and $YBa_Cu_3O_{7-x}$(YBCO) electrodes by laser ablation technique. The crystalline quality of the heteroepitaxial BST films deposited on Pt bottom electrode was found to be better than that of BST film on YBCO electrode by the RBS analysis. Films deposited at $600^{\circ}C$ on Pt electrode showed a dielectric constant of 320 and a dissipation factor of 0.023 at 100kHz. Leakage current density of BST films on Pt electrode was smaller than that on YBCO bottom electrode. Their leakage current density was about 0.8$\mu \; A/ \textrm{cm}^2$ at an applied electric field of 0.15MV/cm.

Laser ablation기술에 의해 Pt와 $YBa_Cu_3O_{7-x}$(YBCO)전극위에 epitaxially성장된 BST박막의 조성과 전기적 특성이 연구되었다. RBS분석으로부터 Pt전극 위에 증착된 BST박막의 결정성이 YBCO전극 위에 증착된 것보다도 더 우수하였다. $600^{\circ}C$에서 Pt 전극위에 증착된 BST박막은 100kHz의 주파수에서 유전상수가 320, 유전손실이 0.023이었다. Pt전극위에 증착된 BST박막의 누설전류 밀도가 TBCO전극위에 증착된 것 보다도 더 작았다. 0.15MV/cm의 전기장 하에서 누설전류밀도는 약 0.8 $\mu \; A/ \textrm{cm}^2$이었다.