Abstract
Piezoelectric ZnO thin films were deposited on 7059 glass substrate by rf magnetron sputtering. The effects of deposition parameter, such as rf power, gas pressure and $O_{2}$/Ar gas ratio, on the crystallinity and electrical properties of the deposited ZnO thin films were studied. It was found that the deposition rate was higher than the previously reported values. ZnO films were suitable for SAW filter since a standard deviation of XRD (002) peak rocking curve was less than $6^{\circ}$. ZnO thin films, which were deposited at $O_{2}$/Ar ratio larger than 25%, showed high resistance. SAW filter was fabricated using ZnO film, of which thickness was 0.25 of the wavelength of the propatating surface acoustic wave. The measured frequency response was consistent with the calculated one. The SAW filter had center frequency 39.08 MHz, phase velocity 2501 m/sec and insertion loss 29 dB.
rf 마그네트론 스퍼터링법을 이용하여 7059 유리기판 위에 ZnO압전박막을 증착하고, 공정변수인 rf 인가전력, 반응기 압력, $O_{2}$/Ar의 조성비등이 증착되는 박막의 결정성 및 전기적 특성에 미치는 영향을 고찰하였다. 증착된 ZnO박막은 문헌에 보고된 증착속도보다 높은 값(200-1000$\AA$/min)을 가졌으며, XRD(002)피크의 rocking curve 표준편차가 SAW 필터로의 응용이 가능한 $6^{\circ}$미만의 값을 가졌다. $O_{2}$Ar 유입비가 25%이상의 경우에는 매우 높은 저항치를 가짐을 알 수 있었다. ZnO박막의 두께와 파장의 비, $\frac{h}{\lambda}$=0.25인 조건에서 필터를 제조하였다. 측정한 주파수 응답특성과 이론치에 의해 계산한 주파수응답특성은 비교적 잘 일치함을 알 수 있었다. 이때 중심주파수는 39.08MHz였으며, 상속도는 \ulcorner 2501m/sec, 삽입손실은 약 29dB였다.
