Journal of the Korean Institute of Telematics and Electronics A (전자공학회논문지A)

The Institute of Electronics and Information Engineers (대한전자공학회)
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Fabrication of a Humidity Sensing Device using Silicon Thermopile

실리콘 Thermopile을 이용한 감습 소자의 제작

  • 김태윤 (금성중앙연구소) ;
  • 주병권 (한국과학기술연구원 이공학연구단) ;
  • 오명환 (한국과학기술연구원 이공학연구단) ;
  • 박정호 (고려대학교 전자공학과)
  • Published : 1994.04.01
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Abstract

A humidity sensing device based on a new humidity sensing principle is designed and fabricated in this study. The silicon thermopile is consisted of 25 couples of p-type diffused layer/Al strips. The internal resistance and the Seebeck coefficient are 300kl and 537$\mu$V/K, respectively Fabricated sensors showed linear response characteristics proportional to relative humidity changes with a sensitivity of 9$\mu$V/%RH in the range from 20% to 90%.

Keywords