Journal of the Korean Institute of Telematics and Electronics A (전자공학회논문지A)
- Volume 31A Issue 4
- /
- Pages.84-91
- /
- 1994
- /
- 1016-135X(pISSN)
Study on the Fabrication and Characterization of Compact ECR Plasma System
Compact ECR plasma장치의 제작 및 특성 연구
Abstract
A compact electron cyclotron resonance(ECR) plasma system composed of a microwave generator and a magnet coil was fabricated. A Langmuir single probe was used to investigate the plasma characteristics of the system through I-V measurements. The performance of the compact ECR plasma system was tested for the case of silicon etching reaction with
Keywords